Onium salt compound, resist composition, and pattern forming process

ABSTRACT

Sulfonium and iodonium salts of a carboxylate having an aromatic ring to which a nitrogen-containing alkyl or cyclic structure is attached are novel. The onium salt functions as an acid diffusion controlling agent in a resist composition, enabling to form a pattern of good profile with high resolution, improved MEF, LWR and DOF.

CROSS-REFERENCE TO RELATED APPLICATION

This non-provisional application claims priority under 35 U.S.C. §119(a)on Patent Application No. 2014-226553 filed in Japan on Nov. 7, 2014,the entire contents of which are hereby incorporated by reference.

TECHNICAL FIELD

This invention relates to an onium salt compound of specific structure,a resist composition, typically chemically amplified resist compositioncomprising the salt, and a pattern forming process using the resistcomposition.

BACKGROUND ART

While a number of recent efforts are being made to achieve a finerpattern rule in the drive for higher integration densities and operatingspeeds in LSI devices, DUV and EUV lithography is thought to holdparticular promise as the next generation in microfabricationtechnology. In particular, photolithography using an ArF excimer laseras the light source is thought requisite to the micropatterningtechnique capable of achieving a feature size of 0.13 μm or less.

The ArF lithography started partial use from the fabrication of 130-nmnode devices and became the main lithography since 90-nm node devices.Although lithography using F₂ laser (157 nm) was initially thoughtpromising as the next lithography for 45-nm node devices, itsdevelopment was retarded by several problems. A highlight was suddenlyplaced on the ArF immersion lithography that introduces a liquid havinga higher refractive index than air (e.g., water, ethylene glycol,glycerol) between the projection lens and the wafer, allowing theprojection lens to be designed to a numerical aperture (NA) of 1.0 orhigher and achieving a higher resolution. While the ArF immersionlithography has entered the commercial stage, the technology still needsa resist material which is substantially non-leachable in water.

In the ArF lithography (193 nm), a high sensitivity resist materialcapable of achieving a high resolution at a small dose of exposure isneeded to prevent the degradation of precise and expensive opticalsystem materials. Among several measures for providing high sensitivityresist material, the most common is to select each component which ishighly transparent at the wavelength of 193 nm. For example, polyacrylicacid and derivatives thereof, norbornene-maleic anhydride alternatingcopolymers, polynorbornene, ring-opening metathesis polymerization(ROMP) polymers, and hydrogenated ROMP polymers have been proposed asthe base resin. This choice is effective to some extent in enhancing thetransparency of a resin alone.

With the rapid progress toward miniaturization, it becomes difficult toform a pattern of desired size from a resist material. In particular,the influence of acid diffusion is detrimental to lithographyperformance. As the pattern size is approaching the diffusion length ofacid, the degradation of contrast becomes more serious. As the maskerror factor (MEF), indicative of a dimensional shift on wafer relativeto a dimensional shift on mask, increases, a noticeable drop of maskfidelity ensues. Further there is the tendency that the depth of focusbecomes shallower as the wavelength of the light source becomes shorter.It is thus desired that the resist material have a depth of focus toenable resolution over a wide imaging range even when a light source ofshort wavelength is used. In addition, the fluctuation of pattern linewidth, known as line width roughness (LWR), becomes a problem. In thestep of processing gate electrodes in the LSI circuit manufacturingprocess, for example, poor LWR gives rise to such problems as leakcurrent, degrading electrical properties of transistors.

Accordingly, to take full advantage of wavelength reduction of the lightsource and increase of NA, it is ideal for a resist material that theacid generated therein be limited to exposed regions and uniformlydistributed therein. It is thus necessary to control acid diffusion at ahigher level than in prior art resist materials.

In addition to the above problems, the immersion lithography suffersfrom problems including a failure of resist pattern profile caused bydefects resulting from microscopic water droplets left on theresist-coated wafer after exposure, and collapse or T-top configurationof resist pattern after development. For the immersion lithography aswell, a pattern forming process capable of forming a satisfactory resistpattern after development is desired.

To solve the outstanding problems, studies are made not only on baseresins and photoacid generators, but also on diffusion controllingagents. Amines are typically used as the diffusion controlling agent.Many problems associated with line width roughness (LWR) as an index ofpattern roughness and pattern profile are left unsolved. Also use ofweak acid onium salts as the diffusion controlling agent is under study.For example, Patent Document 1 describes a positive photosensitivecomposition for ArF excimer laser lithography comprising a carboxylicacid onium salt. The composition is based on the mechanism that a saltexchange occurs between a weak acid onium salt and a strong acid(sulfonic acid) generated by a PAG upon exposure, to form a weak acidand a strong acid onium salt. That is, the strong acid(α,α-difluorosulfonic acid) having high acidity is replaced by a weakacid (alkanesulfonic acid or carboxylic acid), thereby suppressingacid-aided decomposition reaction of acid labile group and reducing orcontrolling the distance of acid diffusion. The onium salt apparentlyfunctions as a quencher, that is, diffusion controlling agent. However,as the microfabrication technology is currently further advanced, theresist compositions using such weak acid onium salts becomeunsatisfactory with respect to resolution, MEF, LWR and depth of focus,particularly when processed by the ArF immersion lithography.

Patent Documents 2 and 3 describe photodegradable bases in the form of asulfonium salt whose anion moiety has incorporated therein anitrogen-containing substituent group, adapted to be decomposed to losetheir basicity upon exposure. However, resist materials comprising thesebases still lack the required lithography properties for the currentgeneration of ArF lithography and ArF immersion lithography forultrafine size processing. There is an increasing need for an effectiveacid diffusion controlling agent.

CITATION LIST

Patent Document 1: JP 4226803 (U.S. Pat. No. 6,492,091)

Patent Document 2: JP-A 2006-208781

Patent Document 3: JP-A 2012-123189

DISCLOSURE OF INVENTION

An object of the invention is to provide an onium salt compoundeffective as an acid diffusion controlling agent and a resistcomposition comprising the same, which composition is processed by KrF,ArF, EB or EUV lithography to form a resist pattern with highresolution, improved MEF, LWR, and DOF, and a pattern forming processusing the resist composition.

The inventors have found that a resist composition comprising an oniumsalt compound of specific structure can be processed by lithography toform a resist pattern with high resolution, improved MEF, LWR and DOF,and is suited for high accuracy micropatterning.

In one aspect, the invention provides an onium salt compound having thegeneral formula (1).

Herein R¹¹, R²², R³³, R⁴⁴, R⁵⁵ and R⁰¹ are each independently hydrogen,or a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalent hydrocarbongroup which may be substituted with or separated by a heteroatom, a pairof R¹¹ and R²², or R³³ and R⁰¹ may bond together to form a ring with thecarbon atoms to which they are attached, or a pair of R⁴⁴ and R⁵⁵ maybond together to form a ring with the nitrogen atom to which they areattached, the ring may have an oxygen atom, sulfur atom or NH moietyinterposed therein, j is 0 or 1, k is a number in the range: 0≦k≦1 whenj=0 and 0≦k≦3 when j=1. Z⁺ is a sulfonium cation of the general formula(a) or iodonium cation of the general formula (b):

wherein R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are each independently a straight C₁-C₂₀ orbranched or cyclic C₃-C₂₀ monovalent hydrocarbon group which may besubstituted with or separated by a heteroatom, or any two or more ofR¹⁰⁰, R²⁰⁰ and R³⁰⁰ may bond together to form a ring with the sulfuratom, the ring may have a carbonyl moiety, sulfur atom, S(═O) moiety,SO₂ moiety, oxygen atom, or NH moiety interposed therein, R⁴⁰⁰ and R⁵⁰⁰are each independently a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom.

In another aspect, the invention provides a resist compositioncomprising (A) the onium salt compound defined above, (B) a polymer, (C)a photoacid generator, and (D) an organic solvent, the polymercomprising recurring units having the general formulae (2) and (3).

Herein R^(1a) is hydrogen, fluorine, methyl or trifluoromethyl, Z^(a) isa single bond, phenylene, naphthylene or (backbone)-C(═O)—O—Z′—, Z′ is astraight C₁-C₁₀ or branched or cyclic C₃-C₁₀ alkylene group which maycontain a hydroxyl moiety, ether bond, ester bond or lactone ring, orphenylene or naphthylene group, XA is an acid labile group, and YL ishydrogen or a polar group having at least one structure selected fromthe group consisting of hydroxyl, cyano, carbonyl, carboxyl, ether bond,ester bond, sulfonate bond, carbonate bond, lactone ring, sultone ring,and carboxylic anhydride.

Preferably, the polymer further comprises recurring units (d1) or (d2)having the general formula:

wherein R^(1a), R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are is as defined above, L′ is aC₂-C₅ alkylene group, R^(Y) is a straight C₁-C₂₀, or branched or cyclicC₃-C₂₀ monovalent hydrocarbon group which may be substituted with orseparated by a heteroatom, A is hydrogen or trifluoromethyl, L″ is asingle bond or a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ divalenthydrocarbon group which may be substituted with or separated by aheteroatom, m is 0 or 1, n is 0 or 1, with the proviso that n is 0 whenL″ is a single bond.

In a preferred embodiment, the photoacid generator has the generalformula (4).

Herein R¹⁰⁰, R²⁰⁰, and R³⁰⁰ are as defined above, X⁻ is an anion of anyone of the general formulae (5) to (8):

wherein R^(fa), R^(fb1), R^(fb2), R^(fc1), R^(fc2), and R^(fc3) are eachindependently fluorine or a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom, R^(fb1) and R^(fb2), or R^(fc1) and R^(fc2) may bondtogether to form a ring with the segments to which they are attached,R^(fd) is a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀ monovalenthydrocarbon group which may be substituted with or separated by aheteroatom.

The resist composition may further comprise a nonionicnitrogen-containing compound, and a surfactant which is insoluble orsubstantially insoluble in water and soluble in alkaline developerand/or a surfactant which is insoluble or substantially insoluble inwater and alkaline developer.

In a further aspect, the invention provides a pattern forming processcomprising the steps of applying the resist composition defined aboveonto a substrate, prebaking to form a resist film, exposing the resistfilm to KrF excimer laser, ArF excimer laser, EB or EUV through aphotomask, baking, and developing the exposed resist film in adeveloper.

The exposing step is preferably by immersion lithography wherein aliquid having a refractive index of at least 1.0 is interposed betweenthe resist film and a projection lens. In the immersion lithography, aprotective film may be formed on the resist film, and the liquid isinterposed between the protective film and the projection lens.

Advantageous Effects of Invention

Since the onium salt compound exerts a satisfactory function of aciddiffusion controlling agent, the inventive resist composition comprisingthe same enables to form a pattern of good profile with a highresolution, low MEF, low LWR, and improved DOF.

BRIEF DESCRIPTION OF ACCOMPANYING DRAWINGS

FIG. 1 is a diagram of ¹H-NMR spectrum of the compound obtained inSynthesis Example 1-1.

DESCRIPTION OF EMBODIMENTS

As used herein, the singular forms “a,” “an” and “the” include pluralreferents unless the context clearly dictates otherwise. The notation(Cn-Cm) means a group containing from n to m carbon atoms per group.

The abbreviations and acronyms have the following meaning.

EB: electron beam

DUV: deep ultraviolet

EUV: extreme ultraviolet

Mw: weight average molecular weight

Mn: number average molecular weight

Mw/Mn: molecular weight distribution or dispersity

GPC: gel permeation chromatography

PEB: post-exposure bake

PAG: photoacid generator

MEF: mask error factor

LWR: line width roughness

DOF: depth of focus

In structural formulae, the broken line denotes a valence bond; Phstands for phenyl and Ac for acetyl.

(A) Acid Diffusion Controlling Agent (Onium Salt Compound)

The invention provides an onium salt compound having the general formula(1). This compound functions quite effectively as an acid diffusioncontrolling agent in a resist composition. In conjunction with a resistcomposition wherein an acid is generated by a PAG in the exposed region,the term “acid diffusion controlling agent” refers to a compound capableof trapping the generated acid to prevent the acid from diffusing intothe unexposed region for thereby helping form the desired pattern. Aslong as the function is exerted, the structure of the compound is notparticularly limited. Conventional acid diffusion controlling agentsinclude amines and onium salts of weak acids (e.g., carboxylic acids).

Herein R¹¹, R²², R³³, R⁴⁴, R⁵⁵ and R⁰¹ are each independently hydrogen,or a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalent hydrocarbongroup which may be substituted with or separated by a heteroatom, a pairof R¹¹ and R²², or R³³ and R⁰¹ may bond together to form a ring with thecarbon atoms to which they are attached and the carbon atom(s)therebetween if any, or a pair of R⁴⁴ and R⁵⁵ may bond together to forma ring with the nitrogen atom to which they are attached, the ring mayhave an oxygen atom, sulfur atom or NH moiety interposed therein, j is 0or 1, k is a number in the range: 0≦k≦1 when j=0 and 0≦k≦3 when j=1.

Z⁺ is a sulfonium cation of the general formula (a) or iodonium cationof the general formula (b):

wherein R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are each independently a straight C₁-C₂₀ orbranched or cyclic C₃-C₂₀ monovalent hydrocarbon group which may besubstituted with or separated by a heteroatom, or any two or more ofR¹⁰⁰, R²⁰⁰ and R³⁰⁰ may bond together to form a ring with the sulfuratom, the ring may have a carbonyl moiety, sulfur atom, S(═O) moiety,SO₂ moiety, oxygen atom, or NH moiety interposed therein, R⁴⁰⁰ and R⁵⁰⁰are each independently a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom.

In formula (1), each of R¹¹, R²², R³³, R⁴⁴, R⁵⁵ and R⁰¹ is hydrogen, ora straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalent hydrocarbongroup which may be substituted with or separated by a heteroatom.Specifically, suitable monovalent hydrocarbon groups include methyl,ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, tert-amyl,n-pentyl, n-hexyl, n-octyl, n-nonyl, n-decyl, cyclopentyl, cyclohexyl,2-ethylhexyl, cyclopentylmethyl, cyclopentylethyl, cyclopentylbutyl,cyclohexylmethyl, cyclohexylethyl, cyclohexylbutyl, norbornyl,tricyclo[5.2.1.0^(2,6)]decanyl, adamantyl, adamantylmethyl, phenyl,naphthyl, and anthracenyl. In these groups, one or more hydrogen atommay be replaced by a heteroatom such as oxygen, sulfur, nitrogen, orhalogen, or one or more carbon atom may be replaced by a heteroatom suchas oxygen, sulfur or nitrogen, to form a hydroxyl group, cyano group,carbonyl group, ether bond, thioether bond, ester bond, sulfonate(sulfonic acid ester) bond, carbonate bond, carbamate bond, lactonering, sultone ring, carboxylic anhydride or haloalkyl group.

With respect to the partial moiety of the formula:

in formula (1), when R⁴⁴ and R⁵⁵ bond together to form a ring with thenitrogen atom, the ring is exemplified by the following structures.

In the formulae, the broken line denotes a valence bond to the aromaticring in formula (1).

Preferred structures for the anion moiety of the onium salt compoundhaving formula (1) are shown below by formulae (A-1) to (A-43) althoughthe invention is not limited thereto.

Of the anions of structural formulae (A-1) to (A-43), those of formulae(A-1) to (A-23) are especially preferred for availability of startingcarboxylic acids and ease of synthesis.

In formula (a), R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are each independently a straightC₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalent hydrocarbon group whichmay be substituted with or separated by a heteroatom. Examples of themonovalent hydrocarbon group are as exemplified for R¹¹, R²², R³³, R⁴⁴,R⁵⁵ and R⁰¹ in formula (1). Also, any two or more of R¹⁰⁰, R²⁰⁰ and R³⁰⁰may bond together to form a ring with the sulfur atom in formula (a),and the ring may have a carbonyl moiety, sulfur atom, S(═O) moiety, SO₂moiety, oxygen atom, or NH moiety interposed therein. In this case,exemplary structures are shown below.

Herein, R⁶⁰⁰ is a monovalent hydrocarbon group as exemplified above forR¹⁰⁰, R²⁰⁰ and R³⁰⁰.

Preferred structures for the sulfonium cation having formula (a) areshown below although the invention is not limited thereto.

In formula (b), R⁴⁰⁰ and R⁵⁰⁰ are each independently a straight C₁-C₂₀or branched or cyclic C₃-C₂₀ monovalent hydrocarbon group which may besubstituted with or separated by a heteroatom. Examples of themonovalent hydrocarbon group are as exemplified for R¹¹, R²², R³³, R⁴⁴,R⁵⁵ and R⁰¹ in formula (1). Inter alia, aryl is preferred.

Preferred examples of the iodonium cation having formula (b) includebis(4-methylphenyl)iodonium, bis(4-ethylphenyl)iodonium,bis(4-tert-butylphenyl)iodonium,bis(4-(1,1-dimethylpropyl)phenyl)iodonium,4-methoxyphenylphenyliodonium, 4-tert-butoxyphenylphenyliodonium,4-acryloyloxyphenylphenyliodonium, and4-methacryloyloxyphenylphenyliodonium, withbis(4-tert-butylphenyl)iodonium being especially preferred.

Illustrative structures of the carboxylic acid sulfonium or iodoniumsalt include arbitrary combinations of the above-exemplified anionmoieties with the above-exemplified cation moieties.

The carboxylic acid onium salt of the invention functions as an aciddiffusion controlling agent. The acid diffusion controlling mechanism isestimated as follows. In a resist composition, a PAG generates an acidwhich must be strongly acidic enough to deprotect the acid labile groupon the base resin, for example, α-fluorinated sulfonic acid, imidic acidor methidic acid in the case of ArF lithography. If a PAG and an aciddiffusion controlling agent (according to the invention) are co-presentin a resist composition, the acid generated by the PAG undergoes ionexchange with the acid diffusion controlling agent and is converted backto the sulfonium or iodonium salt and instead, the anion moiety of theacid diffusion controlling agent is released as carboxylic acid.Differently stated, through ion exchange, the strong acid is neutralizedwith the carboxylic acid onium salt. That is, the carboxylic acid oniumsalt according to the invention functions as an acid diffusioncontrolling agent. On the other hand, the mechanism that the cationmoiety of the carboxylic acid onium salt is photodegraded to generatecarboxylic acid may, of course, be contemplated. However, the acidgenerated via this mechanism is a weak acid which has not a sufficientacidity to deprotect the acid labile group on the base resin.

The acid diffusion controlling agent, which may also be referred to asonium salt type quencher, tends to form a resist pattern with a reducedLWR as compared with the conventional quenchers in the form of aminecompounds. This is probably because salt exchange between strong acidand carboxylic acid onium salt is infinitely repeated. The site wherestrong acid is generated at the end of exposure shifts from the sitewhere the onium salt of strong acid generation type is initiallypresent. It is believed that since the cycle of photo-acid generationand salt exchange is repeated many times, the acid generation point isaveraged, which leads to a resist pattern with reduced LWR afterdevelopment.

As a matter of course, the acid diffusion controlling agent is presentin the unexposed region as well. It is believed that the agent traps theacid having diffused from the exposed region to the unexposed region viathe aforementioned ion exchange reaction. It is also believed that sincethe acid diffusion controlling agent has basic nitrogen in its anionmoiety, the nitrogen directly traps the acid. Both the effects ensure toquench the acid having diffused from the exposed region to the unexposedregion. It is expected that acid diffusion is substantially controlled.Thus the contrast between exposed and unexposed regions is enhanced,leading to substantial improvements in resolution and DOF.

As the compound that exerts a quencher effect by a similar mechanism,Patent Document 1 and JP-A H11-327143 report the use of carboxylic acidonium salts, alkylsulfonic acid onium salts, and arylsulfonic acid oniumsalts as the acid diffusion controlling agent. However, on use of analkylsulfonic acid onium salt or arylsulfonic acid onium salt, thegenerated acid has a certain acid strength so that part thereof mayinduce deprotection reaction in the overexposed region rather thanfunctioning as the quencher, to promote acid diffusion, leading todegradation of resist performance factors like resolution and MEF. Also,in the case of an alkanecarboxylic acid onium salt, the carboxylic acidgenerated therefrom has too weak an acidity to react with the acidlabile group on the base resin. However, the alkanecarboxylic acid oniumsalt cannot fully trap the strong acid generated from the PAG and havingdiffused into the unexposed region, resulting in shortage of resolutionand DOF. In contrast, the acid diffusion controlling agent of theinvention has a quench ability due to both ion exchange andneutralization by reaction of nitrogen, and thus ensures to trap theacid having diffused into the unexposed region, as compared with thealkanecarboxylic acid onium salt.

Also, Patent Documents 2 and 3 describe a photodegradable base in theform of a sulfonium salt whose anion moiety has a nitrogen-containingsubstituent group incorporated therein, adapted to be decomposed to loseits basicity upon exposure. A high contrast is achievable since thisbase loses basicity in the exposed region, but maintains basicity in theunexposed region. In practice, however, control of acid diffusion isinsufficient, and resist performance in terms of resolution and MEF isunsatisfactory. This is probably because the sulfonio acid generatedfrom the photodegradable base in the exposed region also contributes todeprotection reaction along with the PAG.

On the other hand, JP-A 2007-293250 shows some sulfonium or iodoniumsalts of nitrogen-containing carboxylic acids though synthesis examplesthereof are described nowhere. The nitrogen-containing carboxylates ofmonocyclic form generally have high water solubility and very loworganic solvent solubility. Thus these salts are less compatible inresist compositions. These properties lead to a possibility to aggravatesuch performance as pattern profile and roughness in that the unexposedregion is partially dissolved away in the positive resist process ofalkaline development type, or the unexposed region is not fullydissolved and partially left in the negative tone process of organicsolvent development type.

In contrast, the acid diffusion controlling agent of the invention ischaracterized in that the anion moiety is a carboxylate having anaromatic ring to which a nitrogen-containing alkyl group ornitrogen-containing cyclic structure is attached. Thus the agent has ahigh solubility in solvents and eliminates the possibility ofperformance aggravation by solubility as mentioned above. As previouslydiscussed, the acid diffusion controlling agent also has the acidtrapping function via ion exchange, whereby LWR is improved. Further,the acid diffusion controlling agent can trap the acid having diffusedinto the unexposed region by the quench function due to both ionexchange reaction and neutralization reaction of theheteroatom-containing site, thereby achieving an improvement incontrast, a high level of acid diffusion control, and improvements inlithography factors including MEF, DOF and resolution. The resistcomposition comprising the acid diffusion controlling agent is quiteeffective for micropatterning.

When the onium salt compound having formula (1) is added to a resistcomposition, it is preferably used in an amount of 0.1 to 40 parts, morepreferably 1 to 20 parts by weight per 100 parts by weight of the baseresin. Outside the range, a less amount of the compound may fail toachieve the full function whereas a larger amount may invite performancedegradations such as a lowering of sensitivity and formation of foreignparticles due to short solubility.

The onium salt compound having formula (1) may be readily synthesized byany organic chemistry procedures well known to the artisan in the art.For example, the desired compound may be synthesized by ion exchangereaction of a carboxylic acid as a precursor to the anion moiety informula (1) with a cationic agent such as triarylsulfonium halide ordiaryliodonium halide. The carboxylic acid as the starting reactant maybe synthesized by any well-known organic chemistry procedures or anycommercially available products may be used. One typical method for thesynthesis of the carboxylic acid as the starting reactant is theBuchwald-Hartwig reaction of a halo-arene compound with an aminecompound in the presence of a palladium complex catalyst. The ionexchange reaction may be readily carried out by any well-knowntechniques, with reference to JP-A 2007-145797, for example.

Resist Composition

Another embodiment of the invention is directed to a resist composition,typically chemically amplified resist composition, comprising (A) theonium salt compound or acid diffusion controlling agent of formula (1)as an essential component, (B) a polymer as a base resin, (C) aphotoacid generator, and (D) an organic solvent. If necessary, theresist composition may further comprise (E) a nonionicnitrogen-containing compound, (F) a surfactant which is insoluble orsubstantially insoluble in water and soluble in alkaline developer,and/or a surfactant which is insoluble or substantially insoluble inwater and alkaline developer (hydrophobic resin), and (G) an organicacid derivative and/or fluorinated alcohol.

(B) Base Resin

The base resin used in the resist composition is a polymer comprisingrecurring units having the general formula (2) and recurring unitshaving the general formula (3).

Herein R^(1a) is hydrogen, fluorine, methyl or trifluoromethyl, Z^(a) isa single bond, phenylene, naphthylene or (backbone)-C(═O)—O—Z′—, whereinZ′ is a straight C₁-C₁₀ or branched or cyclic C₃-C₁₀, alkylene groupwhich may contain a hydroxyl radical, ether bond, ester bond or lactonering, or a phenylene or naphthylene group. XA is an acid labile group.YL is hydrogen or a polar group having at least one structure selectedfrom the group consisting of hydroxyl, cyano, carbonyl, carboxyl, etherbond, ester bond, sulfonate bond, carbonate bond, lactone ring, sultonering, and carboxylic anhydride.

Examples of the structure of formula (2) wherein Z^(a) is a variant areillustrated below.

The polymer comprising recurring units having formula (2) functions suchthat it may be decomposed to generate carboxylic acid under the actionof an acid and turn alkali soluble. The acid labile group represented byXA may be selected from a variety of such groups. Examples of the acidlabile group include groups of the following general formulae (L1) to(L4), tertiary alkyl groups of 4 to 20 carbon atoms, preferably 4 to 15carbon atoms, trialkylsilyl groups in which each alkyl moiety has 1 to 6carbon atoms, and oxoalkyl groups of 4 to 20 carbon atoms.

In formula (L1), R^(L01) and R^(L02) are hydrogen or straight, branchedor cyclic alkyl groups of 1 to 18 carbon atoms, preferably 1 to 10carbon atoms. Exemplary alkyl groups include methyl, ethyl, propyl,isopropyl, n-butyl, sec-butyl, tert-butyl, cyclopentyl, cyolohexyl,2-ethylhexyl, n-octyl, norbornyl, tricyclodecanyl, tetracyclododecanyl,and adamantyl. R^(L03) is a monovalent hydrocarbon group of 1 to 18carbon atoms, preferably 1 to 10 carbon atoms, which may contain aheteroatom such as oxygen, examples of which include unsubstitutedstraight, branched or cyclic alkyl groups and straight, branched orcyclic alkyl groups in which some hydrogen atoms are replaced byhydroxyl, alkoxy, oxo, amino, alkylamino or the like, or in which anoxygen atom intervenes between carbon atoms. Exemplary straight,branched or cyclic alkyl groups include methyl, ethyl, propyl,isopropyl, n-butyl, sec-butyl, tert-butyl, cyclopentyl, cyclohexyl,2-ethylhexyl, n-octyl, norbornyl, tricyclodecanyl, tetracyclododecanyl,and adamantyl. Illustrative examples of the substituted alkyl groups areshown below.

A pair of R^(L01) and R^(L02), R^(L01) and R^(L03), or R^(L02) andR^(L03) may bond together to form a ring with the carbon and oxygen atomto which they are attached. Each of R^(L01), R^(L02) and R^(L03) is astraight or branched alkylene group of 1 to 18 carbon atoms, preferably1 to 10 carbon atoms when they form a ring.

In formula (L2), R^(L04) is a tertiary alkyl group of 4 to 20 carbonatoms, preferably 4 to 15 carbon atoms, a trialkylsilyl group in whicheach alkyl moiety has 1 to 6 carbon atoms, an oxoalkyl group of 4 to 20carbon atoms, or a group of formula (L1). Exemplary tertiary alkylgroups are tert-butyl, tert-amyl, 1,1-diethylpropyl,2-cyclopentylpropan-2-yl, 2-cyclohexylpropan-2-yl,2-(bicyclo[2.2.1]heptan-2-yl)propan-2-yl, 2-(adamantan-1-yl)propan-2-yl,1-ethylcyclopentyl, 1-butylcyclopentyl, 1-ethyloyclohexyl,1-butyloyclohexyl, 1-ethyl-2-cyclopentenyl, 1-ethyl-2-cyclohexenyl,2-methyl-2-adamantyl, and 2-ethyl-2-adamantyl. Exemplary trialkylsilylgroups are trimethylsilyl, triethylsilyl, and dimethyl-tert-butylsilyl.Exemplary oxoalkyl groups are 3-oxocyclohexyl, 4-methyl-2-oxooxan-4-yl,and 5-methyl-2-oxooxolan-5-yl. Letter y is an integer of 0 to 6.

In formula (L3), R^(L05) is an optionally substituted, straight,branched or cyclic C₁-C₈ alkyl group or an optionally substituted C₆-C₂₀aryl group. Examples of the optionally substituted alkyl group includestraight, branched or cyclic alkyl groups such as methyl, ethyl, propyl,isopropyl, n-butyl, sec-butyl, tert-butyl, tert-amyl, n-pentyl, n-hexyl,cyclopentyl and oyclohexyl, and substituted forms of the foregoing inwhich some hydrogen atoms are substituted by hydroxyl, alkoxy, carboxyl,alkoxycarbonyl, oxo, amino, alkylamino, cyano, mercapto, alkylthio,sulfo or the like. Examples of the optionally substituted aryl groupsinclude phenyl, methylphenyl, naphthyl, anthryl, phenanthryl, andpyrenyl. Letter m′ is equal to 0 or 1, n′ is equal to 0, 1, 2 or 3, and2m′+n′ is equal to 2 or 3.

In formula (L4), R^(L06) is an optionally substituted, straight,branched or cyclic C₁-C₈ alkyl group or an optionally substituted C₆-C₂₀aryl group. Examples of these groups are the same as exemplified forR^(L05). R^(L07) to R^(L16) independently represent hydrogen or C₁-C₁₅monovalent hydrocarbon groups. Exemplary hydrocarbon groups arestraight, branched or cyclic alkyl groups such as methyl, ethyl, propyl,isopropyl, n-butyl, sec-butyl, tert-butyl, tert-amyl, n-pentyl, n-hexyl,n-octyl, n-nonyl, n-decyl, cyolopentyl, oyclohexyl, cyclopentylmethyl,cyclopentylethyl, cyclopentylbutyl, cyclohexylmethyl, cyclohexylethyland cyclohexylbutyl, and substituted forms of the foregoing in whichsome hydrogen atoms are replaced by hydroxyl, alkoxy, carboxyl,alkoxycarbonyl, oxo, amino, alkylamino, cyano, mercapto, alkylthio,sulfo or other groups. Alternatively, two of R^(L07) to R^(L16) may bondtogether to form a ring with the carbon atom to which they are attached(for example, a pair of R^(L07) and R^(L08), R^(L07) and R^(L09),R^(L07) and R^(L10), R^(L08) and R^(L10), R^(L09) and R^(L10), R^(L11)and R^(L12), R^(L13) and R^(L14), or a similar pair form a ring). Eachof R^(L07) to R^(L16) represents a divalent C₁-C₁₅ hydrocarbon groupwhen they form a ring, examples of which are the ones exemplified abovefor the monovalent hydrocarbon groups, with one hydrogen atom beingeliminated. Two of R^(L07) to R^(L16) which are attached to vicinalcarbon atoms may bond together directly to form a double bond (forexample, a pair of R^(L07) and R^(L09), R^(L09) and R^(L15), R^(L13) andR^(L15), R^(L14) and R^(L15), or a similar pair).

Of the acid labile groups of formula (L1), the straight and branchedones are exemplified by the following groups.

Of the acid labile groups of formula (L1), the cyclic ones are, forexample, tetrahydrofuran-2-yl, 2-methyltetrahydrofuran-2-yl,tetrahydropyran-2-yl, and 2-methyltetrahydropyran-2-yl.

Examples of the acid labile groups of formula (L2) includetert-butoxycarbonyl, tert-butoxycarbonylmethyl, tert-amyloxycarbonyl,tert-amyloxycarbonylmethyl, 1,1-diethylpropyloxycarbonyl,1,1-diethylpropyloxycarbonylmethyl, 1-ethylcyclopentyloxycarbonyl,1-ethylcyclopentyloxyoarbonylmethyl, 1-ethyl-2-oyclopentenyloxycarbonyl,1-ethyl-2-cyclopentenyloxycarbonylmethyl, 1-ethoxyethoxyearbonylmethyl,2-tetrahydropyranyloxycarbonylmethyl, and2-tetrahydrofuranyloxycarbonylmethyl groups.

Examples of the acid labile groups of formula (L3) include1-methylcyclopentyl, 1-ethylcyclopentyl, 1-n-propylcyclopentyl,1-isopropylcyclopentyl, 1-n-butyloyclopentyl, 1-sec-butylcyclopentyl,1-cyclohexylcyclopentyl, 1-(4-methoxy-n-butyl)cyclopentyl,1-methylcyclohexyl, 1-ethylcyclohexyl, 3-methyl-1-cyclopenten-3-yl,3-ethyl-1-cyclopenten-3-yl, 3-methyl-1-cyclohexen-3-yl, and3-ethyl-1-cyclohexen-3-yl groups.

Of the acid labile groups having formula (L4), groups having thefollowing formulas (L4-1) to (L4-4) are preferred.

In formulas (L4-1) to (L4-4), the broken line denotes a bonding site anddirection. R^(L41) is each independently a monovalent hydrocarbon group,typically a straight, branched or cyclic C₁-C₁₀ alkyl group, such asmethyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl,tert-amyl, n-pentyl, n-hexyl, cyclopentyl and cyclohexyl.

For formulas (L4-1) to (L4-4), there can exist enantiomers anddiastereomers. Each of formulae (L4-1) to (L4-4) collectively representsall such stereoisomers. Such stereoisomers may be used alone or inadmixture.

For example, the general formula (L4-3) represents one or a mixture oftwo selected from groups having the following general formulas (L4-3-1)and (L4-3-2).

Similarly, the general formula (L4-4) represents one or a mixture of twoor more selected from groups having the following general formulas(L4-4-1) to (L4-4-4).

Each of formulas (L4-1) to (L4-4), (L4-3-1) and (L4-3-2), and (L4-4-1)to (L4-4-4) collectively represents an enantiomer thereof and a mixtureof enantiomers.

It is noted that in the above formulas (L4-1) to (L4-4), (L4-3-1) and(L4-3-2), and (L4-4-1) to (L4-4-4), the bond direction is on the exoside relative to the bicyclo[2.2.1]heptane ring, which ensures highreactivity for acid catalyzed elimination reaction (see JP-A2000-336121). In preparing these monomers having a tertiary exo-alkylgroup of bicyolo[2.2.1]heptane skeleton as a substituent group, theremay be contained monomers substituted with an endo-alkyl group asrepresented by the following formulas (L4-1-endo) to (L4-4-endo). Forgood reactivity, an exo proportion of at least 50 mol % is preferred,with an exo proportion of at least 80 mol % being more preferred.

Illustrative examples of the acid labile group of formula (L4) are givenbelow.

Examples of the tertiary C₄-C₂₀ alkyl groups, trialkylsilyl groups inwhich each alkyl moiety has 1 to 6 carbon atoms, and C₄-C₂₀ oxoalkylgroups are as exemplified for R^(L04).

Illustrative examples of the recurring units of formula (2) are givenbelow, but not limited thereto.

The above examples correspond to those units of formula (2) whereinZ^(a) is a single bond. Where Z^(a) is other than a single bond, acombination with a similar acid labile group is possible. Thus examplesof the recurring units of formula (2) wherein Z^(a) is other than asingle bond are as illustrated above.

In formula (3), YL is hydrogen, or YL is a polar group having one ormore structures selected from the group consisting of hydroxyl, cyano,carbonyl, carboxyl, ether bond, ester bond, sulfonate (sulfonic acidester) bond, carbonate bond, lactone ring, sultone ring, and carboxylicanhydride.

Illustrative examples of the recurring units of formula (3) are givenbelow, but not limited thereto.

Where the recurring units of formula (3) are incorporated, units havinglactone ring as the polar group are most preferably used.

While the polymer is characterized by comprising recurring units havingformulae (2) and (3), optionally recurring units having the generalformula (d1) or (d2) may also be incorporated.

Herein R^(1a), R¹⁰⁰, R²⁰⁰, and R³⁰⁰ are as defined above. L′ is a C₂-C₅alkylene group. R^(Y) is a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom. A is hydrogen or trifluoromethyl. L″ is a single bondor a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ divalent hydrocarbongroup which may be substituted with or separated by a heteroatom, m is 0or 1, n is 0 or 1, with the proviso that n is 0 when L″ is a singlebond.

In formulae (d1) and (d2), R^(1a) is as defined and exemplified above.L′ is a C₂-C₅ alkylene group, preferably ethylene, propylene orbutylene. A is hydrogen or trifluoromethyl, preferably trifluoromethyl.R^(Y) is a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalenthydrocarbon group, examples of which are as described above for R¹¹,R²², R³³, R⁴⁴, R⁵⁵ and R⁰¹ in formula (1). L″ is a single bond or astraight C₁-C₂₀ or branched or cyclic C₃-C₂₀ divalent hydrocarbon group,examples of which are as descried above. R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are asdescried above.

Illustrative structures of the anion moiety in formula (d1) includethose described in JP-A 2010-113209 and JP-A 2007-145797. Illustrativestructures of the anion moiety in formula (d2) wherein A is hydrogeninclude those described in JP-A 2010-116550. Illustrative structures ofthe anion moiety in formula (d2) wherein A is trifluoromethyl includethose described in JP-A 2010-077404.

While the polymer is characterized by comprising recurring units havingformulae (2) and (3), and optionally recurring units having formula (d1)or (d2), other recurring units, typically recurring units of thestructure having a hydroxyl group protected with an acid labile groupmay be further copolymerized. The recurring units of the structurehaving a hydroxyl group protected with an acid labile group are notparticularly limited as long as the unit has one or more structures eachhaving protected hydroxyl wherein the protective group is decomposedunder the action of acid to generate a hydroxyl group. Of these,recurring units of the structure having the general formula (e1) arepreferred.

In formula (e1), R^(1a) is as defined above; R^(a) is a straight C₁-C₂₀or branched or cyclic C₃-C₂₀ monovalent hydrocarbon group which may besubstituted with or separated by a heteroatom, with the proviso that themonovalent hydrocarbon group of R^(a) has 1, 2, 3 or 4 substituentgroups having formula (e2).—OR^(b)  (e2)Herein R^(b) is an acid labile group.

Illustrative examples of the recurring units having formula (e1) aregiven below, but not limited thereto.

Herein, R^(1a) and R^(b) are as defined above.

The acid labile group R^(b) in formula (e2) is not particularly limitedas long as it is deprotected under the action of acid to generate ahydroxyl group. Suitable acid labile groups include acetal structuregroups, ketal structure groups, and alkoxycarbonyl groups, examples ofwhich are shown below.

Of the acid labile groups represented by R^(b) in formula (e2),alkoxymethyl groups having the general formula (e3) are most preferred.

Herein R^(c) is a straight C₁-C₁₅ or branched or cyclic C₃-C₁₅monovalent hydrocarbon group.

Illustrative examples of the acid labile group having formula (e3) aregiven below, but not limited thereto.

The polymer used herein may have additional recurring units furthercopolymerized therein. Suitable additional recurring units are derivedfrom substituted acrylic acid esters such as methyl methacrylate, methylcrotonate, dimethyl maleate and dimethyl itaconate, unsaturatedcarboxylic acids such as maleic acid, fumaric acid, and itaconic acid,cyclic olefins such as norbornene, norbornene derivatives, andtetracyclo[6.2.1.1^(3,6).0^(2,7)]dodecene derivatives, unsaturated acidanhydrides such as itaconic anhydride, and other monomers. As thehydrogenated ROMP polymer, those described in JP-A 2003-066612 may beused.

The polymer used herein generally has a weight average molecular weight(Mw) of 1,000 to 500,000, and preferably 3,000 to 100,000, as measuredby GPC using polystyrene standards. Outside the range, there may resultan extreme drop of etch resistance, and a drop of resolution due todifficulty to gain a dissolution rate difference before and afterexposure.

The polymer may be synthesized by any desired method, for example, bydissolving an unsaturated bond-containing monomer or monomers in anorganic solvent, adding a radical initiator, and effecting heatpolymerization. Suitable organic solvents used herein include toluene,benzene, tetrahydrofuran, diethyl ether, and dioxane. Examples of thepolymerization initiator used herein include 2,2′-azobisisobutyronitrile(AIBN), 2,2′-azobis(2,4-dimethylvaleronitrile), dimethyl2,2-azobis(2-methylpropionate), benzoyl peroxide, and lauroyl peroxide.Preferably the system is heated at 50 to 80° C. for polymerization totake place. The reaction time is 2 to 100 hours, preferably 5 to 20hours. The acid labile group that has been incorporated in the monomermay be kept as such, or the polymer may be protected or partiallyprotected therewith at the end of polymerization.

In the polymer (B), appropriate molar fractions (mol %) of therespective recurring units derived from the monomers are given belowalthough the invention is not limited thereto. The polymer may comprise:

I) constituent units of at least one type having formula (2) in afraction of 1 to 60 mol %, preferably 5 to 50 mol %, and more preferably10 to 50 mol %,

II) constituent units of at least one type having formula (3) in afraction of 40 to 99 mol %, preferably 50 to 95 mol %, and morepreferably 50 to 90 mol %, and optionally,

III) constituent units of at least one type having formula (d1) or (d2)in a fraction of 0 to 30 mol %, preferably 0 to 20 mol %, and morepreferably 0 to 10 mol %, and optionally,

IV) constituent units of at least one type derived from another monomerin a fraction of 0 to 80 mol %, preferably 0 to 70 mol %, and morepreferably 0 to 50 mol %.

(C) PAG of Formula (4)

While the resist composition of the invention essentially comprises theacid diffusion controlling agent (onium salt) having formula (1), itpreferably further comprises a photoacid generator (PAG) having thegeneral formula (4).

Herein R¹⁰⁰, R²⁰⁰, and R³⁰⁰ are as defined above. X⁻ is an anion of thegeneral formula (5), (6), (7) or (8).

Herein R^(fa), R^(fb1), R^(fb2), R^(fc1), R^(fc2), and R^(fc3) are eachindependently fluorine or a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom. A pair of R^(fb1) and R^(fb2) or R^(fc1) and R^(fc2)may bond together to form a ring with the segments to which they areattached. R^(fd) is a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom.

In formula (5), R^(fa) is fluorine or a straight C₁-C₄₀ or branched orcyclic C₃-C₄₀ monovalent hydrocarbon group which may be substituted withor separated by a heteroatom.

Of the structures of formula (5), a structure having the general formula(5′) is preferred.

Herein R⁷⁷ is hydrogen or trifluoromethyl; R⁸⁸ is a straight C₁-C₃₀ orbranched or cyclic C₃-C₃₀ monovalent hydrocarbon group which may besubstituted with or separated by a heteroatom; R¹⁰⁰, R²⁰⁰ and R³⁰⁰ areas defined above.

In formula (5′), R⁸⁸ is a straight C₁-C₃, or branched or cyclic C₃-C₃₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom. Of the heteroatoms contained in R⁸⁸, oxygen, nitrogen,sulfur and halogen atoms are preferred, with oxygen being mostpreferred. Of the monovalent hydrocarbon groups represented by R⁸⁸,those groups of 6 to 30 carbon atoms are preferred from the aspect ofachieving a high resolution in forming patterns of fine feature size.Suitable monovalent hydrocarbon groups represented by R⁸⁸ include, butare not limited to, methyl, ethyl, propyl, isopropyl, butyl, isobutyl,sec-butyl, tert-butyl, pentyl, neopentyl, cyclopentyl, hexyl,cyclohexyl, 3-cyclohexenyl, heptyl, 2-ethylhexyl, nonyl, undecyl,tridecyl, pentadecyl, heptadecyl, 1-adamantyl, 2-adamantyl,1-adamantylmethyl, norbornyl, norbornylmethyl, tricyclodecanyl,tetracyclododecanyl, tetracyclododeoanylmethyl, dicyclohexylmethyl,eicosanyl, allyl, benzyl, diphenylmethyl, tetrahydrofuryl,methoxymethyl, ethoxymethyl, methylthiomethyl, acetamidomethyl,trifluoromethyl, (2-methoxyethoxy)methyl, acetoxymethyl,2-carboxy-1-cyolohexyl, 2-oxopropyl, 4-oxo-1-adamantyl, and3-oxocyclohexyl,

With respect to the synthesis of sulfonium salts having formula (5′),reference may be made to JP-A 2007-145797, JP-A 2008-106045, JP-A2009-007327, and JP-A 2009-258695. Also useful are the sulfonium saltsdescribed in JP-A 2010-215608, JP-A 2012-041320, JP-A 2012-106986, andJP-A 2012-153644.

Examples of the preferred PAG are shown below.

In formula (6), R^(fb1) and R^(fb2) are each independently fluorine or astraight C₁-C₄₀ or branched or cyclic C₃-C₄₀ monovalent hydrocarbongroup which may be substituted with or separated by a heteroatom.Illustrative examples of the monovalent hydrocarbon group are asexemplified for R^(fa). Preferably R^(fb1) and R^(fb2) are fluorine orC₁-C₄ straight fluorinated alkyl groups. Also, R^(fb1) and R^(fb2) maybond together to form a ring with the linkage: —CF₂—SO₃—N⁻—SO₂—CF₂— towhich they are attached. It is preferred to form a ring structure via afluorinated ethylene or fluorinated propylene group.

In formula (7), R^(fc1), R^(fc2) and R^(fc3) are each independentlyfluorine or a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀ monovalenthydrocarbon group which may be substituted with or separated by aheteroatom. Illustrative examples of the monovalent hydrocarbon groupare as exemplified for R^(fa). Preferably R^(fc1), R^(fc2) and R^(fc3)are fluorine or C₁-C₄ straight fluorinated alkyl groups. Also, R^(fc1)and R^(fc2) may bond together to form a ring with the linkage:—CF₂—SO₂—C⁻—SO₂—CF₂— to which they are attached. It is preferred to forma ring structure via a fluorinated ethylene or fluorinated propylenegroup.

In formula (8), R^(fd) is a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom. Of the heteroatoms contained in R^(fd), oxygen,nitrogen, sulfur and halogen atoms are preferred, with oxygen being mostpreferred. Of the monovalent hydrocarbon groups represented by R^(fd),those groups of 6 to 30 carbon atoms are preferred from the aspect ofachieving a high resolution in forming patterns of fine feature size.Suitable monovalent hydrocarbon groups represented by R^(fd) include,but are not limited to, methyl, ethyl, propyl, isopropyl, butyl,isobutyl, sec-butyl, tert-butyl, pentyl, neopentyl, cyclopentyl, hexyl,cyclohexyl, 3-cyclohexenyl, heptyl, 2-ethylhexyl, nonyl, undecyl,tridecyl, pentadecyl, heptadecyl, 1-adamantyl, 2-adamantyl,1-adamantylmethyl, norbornyl, norbornylmethyl, tricyclodecanyl,tetracyclododecanyl, tetracyclododecanylmethyl, dicyclohexylmethyl,eicosanyl, allyl, benzyl, diphenylmethyl, tetrahydrofuryl,methoxymethyl, ethoxymethyl, methylthiomethyl, acetamidomethyl,trifluoroethyl, (2-methoxyethoxy)methyl, acetoxymethyl,2-carboxy-1-cyclohexyl, 2-oxopropyl, 4-oxo-1-adamantyl, and3-oxocyclohexyl.

With respect to the synthesis of sulfonium salts having the anion offormula (8), reference may be made to JP-A 2010-215608.

Examples of the preferred PAG are shown below.

Notably, the compound having the anion of formula (8) does not havefluorine at the α-position relative to the sulfo group, but twotrifluoromethyl groups at the β-position. For this reason, it has asufficient acidity to sever the acid labile groups in the resistpolymer. Thus the compound is an effective PAG.

Of the foregoing PAG's, those compounds having the structure of formula(5′) or formula (8) are preferred because of suppressed acid diffusionand high solubility in the resist solvent.

The amount of the PAG (C) added is preferably 0 to 40 parts,specifically 0.1 to 40 parts if used, more preferably 0.1 to 20 parts byweight per 100 parts by weight of the base resin. Too large an amount ofthe PAG may give rise to problems such as degraded resolution andforeign particles during development and resist film stripping.

(D) Organic Solvent

The organic solvent (D) used herein may be any organic solvent in whichthe polymer (base resin), PAG, controlling agent, and other componentsare soluble. Examples of the organic solvent include ketones such ascyclohexanone and methyl 2-n-amyl ketone; alcohols such as3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, and1-ethoxy-2-propanol; ethers such as propylene glycol monomethyl ether,ethylene glycol monomethyl ether, propylene glycol monoethyl ether,ethylene glycol monoethyl ether, propylene glycol dimethyl ether, anddiethylene glycol dimethyl ether; esters such as propylene glycolmonomethyl ether acetate (PGMEA), propylene glycol monoethyl etheracetate, ethyl lactate, ethyl pyruvate, butyl acetate, methyl3-methoxypropionate, ethyl 3-ethoxypropionate, tert-butyl acetate,tert-butyl propionate, and propylene glycol mono-tert-butyl etheracetate; and lactones such as γ-butyrolactone, and mixtures thereof, asdescribed in JP-A 2008-111103, paragraphs [0144] to [0145]. Where anacid labile group of acetal type is used, a high-boiling alcohol solventmay be added for accelerating deprotection reaction of acetal, forexample, diethylene glycol, propylene glycol, glycerol, 1,4-butanediol,or 1,3-butanediol. Of the above organic solvents, it is recommended touse 1-ethoxy-2-propanol, PGMEA, cyclohexanone, γ-butyrolactone, andmixtures thereof because the acid generator is most soluble therein.

An appropriate amount of the organic solvent used is 200 to 5,000 parts,more preferably 400 to 3,000 parts by weight per 100 parts by weight ofthe base resin.

(E) Nonionic Nitrogen-Containing Compound

While the acid diffusion controlling agent (A) is essential in theresist composition, a nitrogen-containing compound other than component(A) may be added as the acid diffusion controlling agent. Suitablenitrogen-containing compounds include primary, secondary and tertiaryamine compounds, specifically amine compounds having a hydroxyl group,ether bond, ester bond, lactone ring, cyano group or sulfonate bond, asdescribed in JP-A 2008-111103, paragraphs [0146] to [0164](U.S. Pat. No.7,537,880). Also useful are compounds whose primary or secondary amineis protected in carbamate form as described in JP 3790649.

The nitrogen-containing compounds may be used alone or in admixture oftwo or more. The nitrogen-containing compound is preferably used in anamount of 0.001 to 12 parts, more preferably 0.01 to 8 parts by weightper 100 parts by weight of the base resin.

Also, a sulfonium salt of sulfonic acid having a nitrogen-containingsubstituent may be used in combination as the acid diffusion controllingagent. This compound is a so-called photo-degradable base whichfunctions as quencher in the unexposed region, but loses quencherability through neutralization with the acid generated by itself, in theexposed region. The use of photo-degradable base is effective forenhancing the contrast between exposed and unexposed regions. Withrespect to the photo-degradable base, reference may be made to JP-A2009-109595 and JP-A 2012-046501, for example.

(F) Surfactant which is Insoluble or Substantially Insoluble in Waterand Soluble in Alkaline Developer, and/or a Surfactant which isInsoluble or Substantially Insoluble in Water and Alkaline Developer(Hydrophobic Resin)

To the resist composition, the surfactant (F) may be added. Referenceshould be made to those compounds defined as component (S) in JP-A2010-215608 and JP-A 2011-16746.

While many examples of the surfactant which is insoluble orsubstantially insoluble in water and alkaline developer are described inthese patent documents, preferred examples are FC-4430, Surflon S-381,Surfynol E1004, KH-20 and KH-30, which may be used alone or inadmixture. Partially fluorinated oxetane ring-opened polymers having thestructural formula (surf-1) are also useful.

It is provided herein that R, Rf, A, B, C, m, and n are applied to onlyformula (surf-1), independent of their descriptions other than for thesurfactant. R is a di- to tetra-valent C₂-C₅ aliphatic group. Exemplarydivalent groups include ethylene, 1,4-butylene, 1,2-propylene,2,2-dimethyl-1,3-propylene and 1,5-pentylene. Exemplary tri- andtetra-valent groups are shown below.

Herein the broken line denotes a valence bond. These formulae arepartial structures derived from glycerol, trimethylol ethane,trimethylol propane, and pentaerythritol, respectively. Of these,1,4-butylene and 2,2-dimethyl-1,3-propylene are preferably used.

Rf is trifluoromethyl or pentafluoroethyl, and preferablytrifluoromethyl. The letter m is an integer of 0 to 3, n is an integerof 1 to 4, and the sum of m and n, which represents the valence of R, isan integer of 2 to 4. A is equal to 1, B is an integer of 2 to 25, and Cis an integer of 0 to 10. Preferably, B is an integer of 4 to 20, and Cis 0 or 1. Note that the above structural formula does not prescribe thearrangement of respective constituent units while they may be arrangedeither blockwise or randomly. For the preparation of surfactants in theform of partially fluorinated oxetane ring-opened polymers, referenceshould be made to U.S. Pat. No. 5,650,483, for example.

The surfactant which is insoluble or substantially insoluble in waterand soluble in alkaline developer is useful when ArF immersionlithography is applied to the resist composition in the absence of aresist protective film. In this embodiment, the surfactant has apropensity to segregate on the resist surface after spin coating forachieving a function of minimizing water penetration or leaching. Thesurfactant is also effective for preventing water-soluble componentsfrom being leached out of the resist film for minimizing any damage tothe exposure tool. The surfactant becomes solubilized during alkalinedevelopment following exposure and PEB, and thus forms few or no foreignparticles which become defects. The preferred surfactant is a polymericsurfactant which is insoluble or substantially insoluble in water, butsoluble in alkaline developer, also referred to as “hydrophobic resin”in this sense, and especially which is water repellent and enhanceswater slippage. Suitable polymeric surfactants are shown below.

Herein R¹¹⁴ is each independently hydrogen, fluorine, methyl ortrifluoromethyl. R¹¹⁵ is each independently hydrogen or a straight,branched or cyclic C₁-C₂₀ alkyl or fluoroalkyl group, or two R¹¹⁵ in acommon monomer may bond together to form a ring with the carbon atom towhich they are attached, and in this event, they together represent astraight, branched or cyclic C₂-C₂₀ alkylene or fluoroalkylene group.R¹¹⁶ is fluorine or hydrogen, or R¹¹⁶ may bond with R¹¹⁷ to form anon-aromatic ring of 3 to 10 carbon atoms in total with the carbon atomto which they are attached. R¹¹⁷ is a straight, branched or cyclic C₁-C₆alkylene group in which at least one hydrogen atom may be substituted bya fluorine atom. R¹¹⁵ is a straight or branched C₁-C₁₀ alkyl group inwhich at least one hydrogen atom is substituted by a fluorine atom.Alternatively, R¹¹⁷ and R¹¹⁸ may bond together to form a non-aromaticring with the carbon atoms to which they are attached. In this event,R¹¹⁷, R¹¹⁸ and the carbon atoms to which they are attached togetherrepresent a trivalent organic group of 2 to 12 carbon atoms in total.R¹¹⁹ is a single bond or a C₁-C₄ alkylene. R¹²⁰ is each independently asingle bond, —O—, or —CR¹¹⁴R¹¹⁴—. R¹²¹ is a straight or branched C₃-C₄alkylene group, or may bond with R¹¹⁵ within a common monomer to form aC₃-C₆ non-aromatic ring with the carbon atom to which they are attached.R¹²² is 1,2-ethylene, 1,3-propylene, or 1,4-butylene. Rf is a linearperfluoroalkyl group of 3 to 6 carbon atoms, typically3H-perfluoropropyl, 4H-perfluorobutyl, 5H-perfluoropentyl, or6H-perfluorohexyl. X² is each independently —C(═O)—O—, —O—, or—C(═O)—R¹²³—C(═O)—O—. R¹²³ is a straight, branched or cyclic C₁-C₁₀,alkylene group. The subscripts are in the range:0≦(a′−1)<1, 0≦(a′−2)<1, 0≦(a′−3)<1,0<(a′−1)+(a′−2)+(a′−3)<1, 0≦b′<1, 0≦c′<1, and0<(a′−1)+(a′−2)+(a′−3)+b′+c′≦1.

Exemplary units are shown below.

For the surfactant which is insoluble or substantially insoluble inwater and soluble in alkaline developer, reference may be made to JP-A2008-122932, 2010-134012, 2010-107695, 2009-276363, 2009-192784,2009-191151, 2009-098638, 2010-250105, and 2011-042789.

The polymeric surfactant preferably has a Mw of 1,000 to 50,000, morepreferably 2,000 to 20,000 as measured by GPC versus polystyrenestandards. A surfactant with a Mw outside the range may be lesseffective for surface modification and cause development defects. Thepolymeric surfactant is preferably formulated in an amount of 0.001 to20 parts, and more preferably 0.01 to 10 parts by weight per 100 partsby weight of the base resin. Reference should also be made to JP-A2010-215608.

To the resist composition, a compound which is decomposed with an acidto generate another acid, that is, acid amplifier compound may be added.For these compounds, reference should be made to JP-A 2009-269953 and2010-215608. In the resist composition, an appropriate amount of theacid amplifier compound is up to 2 parts, and especially up to 1 part byweight per 100 parts by weight of the base resin. Excessive amounts ofthe acid amplifier compound make diffusion control difficult, leading todegradation of resolution and pattern profile.

(G) Organic Acid Derivative and/or Fluorinated Alcohol

Optionally, an organic acid derivative or a compound having a Mw of upto 3,000 which changes its solubility in alkaline developer under theaction of an acid, also referred to as dissolution inhibitor, may beadded. Reference may be made to JP-A 2009-269953 and 2010-215608.

Process

A further embodiment of the invention is a pattern forming process usingthe resist composition defined above. A pattern may be formed from theresist composition using any well-known lithography process. Thepreferred process includes at least the steps of forming a resist filmon a substrate, exposing it to high-energy radiation, and developing itin a developer.

The resist composition is applied onto a substrate for integratedcircuit fabrication (e.g., Si, SiO₂, SiN, SiON, TiN, WSi, BPSG, SOG ororganic antireflective coating) or substrate for mask circuitfabrication (e.g., Cr, CrO, CrON or MoSi) by a suitable coatingtechnique such as spin coating. The coating is prebaked on a hot plateat a temperature of 60 to 150° C. for 1 to 10 minutes, preferably 80 to140° C. for 1 to 5 minutes, to form a resist film of 0.05 to 2.0 μmthick. Through a mask with the desired pattern placed over the resistfilm, the resist film is exposed to high-energy radiation, typically KrFexcimer laser, ArF excimer laser or EUV radiation in a dose of 1 to 200mJ/cm², and preferably 10 to 100 mJ/cm². The exposure may be performedby conventional lithography whereas the immersion lithography of holdinga liquid between the mask and the resist film may be employed ifdesired. In this case, a protective film which is insoluble in water maybe applied on the resist film. The resist film is then baked (PEB) on ahot plate at 60 to 150° C. for 1 to 5 minutes, preferably 80 to 140° C.for 1 to 3 minutes. Thereafter the resist film is developed with adeveloper in the form of an aqueous base solution, for example, 0.1 to 5wt %, preferably 2 to 3 wt % aqueous solution of tetramethylammoniumhydroxide (TMAH) for 0.1 to 3 minutes, preferably 0.5 to 2 minutes byconventional techniques such as dip, puddle and spray techniques. Inthis way, a desired resist pattern is formed on the substrate.

The water-insoluble protective film which is used in the immersionlithography is to prevent any components from being leached out of theresist film and to improve water slippage at the film surface and isgenerally divided into two types. The first type is an organicsolvent-strippable protective film which must be stripped, prior toalkaline development, with an organic solvent in which the resist filmis not dissolvable. The second type is an alkali-soluble protective filmwhich is soluble in an alkaline developer so that it can be removedsimultaneously with the removal of solubilized regions of the resistfilm. The protective film of the second type is preferably of a materialcomprising a polymer having a 1,1,1,3,3,3-hexafluoro-2-propanol residue(which is insoluble in water and soluble in an alkaline developer) as abase in an alcohol solvent of at least 4 carbon atoms, an ether solventof 8 to 12 carbon atoms or a mixture thereof. Alternatively, theaforementioned surfactant which is insoluble in water and soluble in analkaline developer may be dissolved in an alcohol solvent of at least 4carbon atoms, an ether solvent of 8 to 12 carbon atoms or a mixturethereof to form a material from which the protective film of the secondtype is formed.

Any desired step may be added to the pattern forming process. Forexample, after a photoresist film is formed, a step of rinsing with purewater (post-soaking) may be introduced to extract the acid generator orthe like from the film surface or wash away particles. After exposure, astep of rinsing (post-soaking) may be introduced to remove any waterremaining on the film after exposure.

The technique enabling the ArF lithography to survive to the 32-nm nodeis a double patterning process. The double patterning process includes atrench process of processing an underlay to a 1:3 trench pattern by afirst step of exposure and etching, shifting the position, and forming a1:3 trench pattern by a second step of exposure for forming a 1:1pattern; and a line process of processing a first underlay to a 1:3isolated left pattern by a first step of exposure and etching, shiftingthe position, processing a second underlay formed below the firstunderlay by a second step of exposure through the 1:3 isolated leftpattern, for forming a half-pitch 1:1 pattern.

In the pattern forming process, positive tone development may be carriedout using an alkaline aqueous solution, typically an aqueous solution of0.1 to 5 wt %, more typically 2 to 3 wt % of tetramethylammoniumhydroxide (TMAH) as the developer. The negative tone developmenttechnique wherein the unexposed region is developed and dissolved in anorganic solvent is also applicable.

In the organic solvent development, the organic solvent used as thedeveloper is preferably selected from 2-octanone, 2-nonanone,2-heptanone, 3-heptanone, 4-heptanone, 2-hexanone, 3-hexanone,diisobutyl ketone, methylcyclohexanone, acetophenone,methylacetophenone, propyl acetate, butyl acetate, isobutyl acetate,amyl acetate, isoamyl acetate, butenyl acetate, phenyl acetate, propylformate, butyl formate, isobutyl formate, amyl formate, isoamyl formate,methyl valerate, methyl pentenoate, methyl crotonate, ethyl crotonate,methyl lactate, ethyl lactate, propyl lactate, butyl lactate, isobutyllactate, amyl lactate, isoamyl lactate, methyl 2-hydroxyisobutyrate,ethyl 2-hydroxyisobutyrate, methyl benzoate, ethyl benzoate, benzylacetate, methyl phenylacetate, benzyl formate, phenylethyl formate,methyl 3-phenylpropionate, benzyl propionate, ethyl phenylacetate, and2-phenylethyl acetate. These organic solvents may be used alone or inadmixture of two or more.

EXAMPLE

Examples of the invention are given below by way of illustration and notby way of limitation.

Synthesis Example 1-1 Synthesis of triphenylsulfonium4-morpholin-4-ylbenzoate (Q-1)

A mixture of 3.1 g of 4-(4-morpholinyl)benzoic acid, 2.0 g of leadcarbonate, 5.8 g of triphenylsulfonium iodide, and 30 g of methanol washeated and stirred at 70° C. for 8 hours. The reaction solution wascooled to room temperature and filtered. The filtrate was concentratedunder reduced pressure. The solid precipitate was washed with methylisobutyl ketone and dried under reduced pressure, obtaining 5.8 g of thetarget compound, triphenylsulfonium 4-morpholin-4-ylbenzoate (yield83%).

The target compound was analyzed by spectroscopy. The NMR spectrum,¹H-NMR in DMSO-d₆, is shown in FIG. 1. In ¹H-NMR analysis, a minuteamount of water was observed.

Infrared Absorption Spectrum (IR (D-ATR): Cm⁻¹)

-   -   3351, 3082, 3038, 3009, 2995, 2861, 2826, 1601, 1549, 1510,        1478, 1449, 1364, 1347, 1235, 1118, 995, 927, 792, 759, 703,        687, 658 cm⁻¹        High-Performance Liquid Chromatography Mass Spectrometry (LC-MS)

Positive M⁺ 263 (corresponding to (C₆H₅)₃S⁺)

Negative M⁻ 206 (corresponding to C₁₀H₁₂NO—CO₂ ⁻)

Polymers for use in resist compositions were synthesized according tothe following formulation. Notably, Mw and Mn are weight and numberaverage molecular weights, respectively, as measured by GPC versuspolystyrene standards using THF solvent, and Mw/Mn is a polydispersityindex.

Synthesis Example 2-1 Synthesis of Polymer P-1

In nitrogen atmosphere, 22 g of 1-tert-butylcyclopentyl methacrylate, 17g of 2-oxotetrahydrofuran-3-yl methacrylate, 0.48 g of dimethyl2,2′-azobis(2-methylpropionate) (V-601 by Wako Pure Chemical Industries,Ltd.), 0.41 g of 2-mercaptoethanol, and 50 g of methyl ethyl ketone werecombined to form a monomer/initiator solution. A flask in nitrogenatmosphere was charged with 23 g of methyl ethyl ketone, which washeated at 80° C. with stirring. With stirring, the monomer/initiatorsolution was added dropwise to the flask over 4 hours. After thecompletion of dropwise addition, the polymerization solution wascontinuously stirred for 2 hours while maintaining the temperature of80° C. The polymerization solution was cooled to room temperature,whereupon it was added dropwise to 640 g of methanol with vigorousstirring. The precipitate was collected by filtration, washed twice with240 g of methanol, and vacuum dried at 50° C. for 20 hours, obtaining 36g of a copolymer in white powder form (yield 90%). On GPC analysis, thecopolymer had a Mw of 8,755 and a Mw/Mn of 1.94.

Synthesis Examples 2-2 to 2-12 Synthesis of Polymers P-2 to P-12

Polymers were synthesized by the same procedure as in Synthesis Example2-1 aside from changing the type and amount of monomers. Table 1 showsthe proportion (in molar ratio) of units incorporated in these polymers,and Tables 2 and 3 show the structure of recurring units.

TABLE 1 Unit 1 Unit 2 Unit 3 Unit 4 Polymer (molar ratio) (molar ratio)(molar ratio) (molar ratio) P-1 A-1 (0.50) B-1 (0.50) — — P-2 A-1 (0.40)B-1 (0.50) B-3 (0.10) — P-3 A-1 (0.50) B-2 (0.20) B-3 (0.20) B-5 (0.10)P-4 A-2 (0.40) B-1 (0.60) — — P-5 A-2 (0.40) B-2 (0.60) — — P-6 A-2(0.20) A-3 (0.30) B-1 (0.40) B-5 (0.10) P-7 A-2 (0.20) A-3 (0.30) B-2(0.40) B-5 (0.10) P-8 A-1 (0.25) A-2 (0.25) B-3 (0.40) B-5 (0.10) P-9A-1 (0.20) A-2 (0.25) B-1 (0.35) B-3 (0.20) P-10 A-3 (0.25) A-5 (0.25)B-1 (0.35) B-5 (0.15) P-11 A-4 (0.50) B-4 (0.50) — — P-12 A-6 (0.35) B-3(0.65) — —

TABLE 2

A-1

A-2

A-3

A-4

A-5

A-6

TABLE 3

B-1

B-2

B-3

B-4

B-5

Examples 1-1 to 1-14 and Comparative Examples 1-1 to 1-7

Preparation of Resist Composition

A resist composition in solution form was prepared by dissolving theacid diffusion controlling agent (Q-1) synthesized above or comparativeacid diffusion controlling agents (Q-2) to (Q-7), each polymer (PolymersP-1 to P-12 synthesized above), a photoacid generator (PAG-X, PAG-Y),and alkali-soluble surfactant (SF-1) in an organic solvent containing0.01 wt % of surfactant A, and filtering through a Teflon® filter with apore size of 0.2 μm. Table 4 shows the formulation of the resultingresist solution.

The solvent, photoacid generator (PAG-X, PAG-Y), alkali-solublesurfactant (SF-1), surfactant A, and comparative acid diffusioncontrolling agents (Q-2 to Q-7) used herein are identified below.

-   -   PGMEA: propylene glycol monomethyl ether acetate    -   GBL: γ-butyrolactone    -   PAG-X: triphenylsulfonium        2-(adamantane-1-carbonyloxy)-1,1,3,3,3-pentafluoropropane-1-sulfonate    -   PAG-Y: triphenylsulfonium        2-(adamantane-1-carbonyloxy)-3,3,3-trifluoro-2-trifluoromethylpropane-1-sulfonate    -   Q-2: 2-(4-morpholinyl)ethyl octadecanoate    -   Q-3: triphenylsulfonium camphorsulfonate    -   Q-4: triphenylsulfonium 1-adamantanecarboxylate (synthesized by        the same procedure as in Synthesis Example 1)    -   Q-5: triphenylsulfonium pyridine-2-carboxylate (prepared        according to JP-A 2007-293250)    -   Q-6: compound of the structure shown below (prepared according        to JP-A 2012-123189)    -   Q-7: compound of the structure shown below (prepared according        to JP-A 2006-208781)

Surfactant (SF-1):

-   -   poly(2,2,3,3,4,4,4-heptafluoro-1-isobutyl-1-butyl        methacrylate/9-(2,2,2-trifluoro-1-trifluoroethyl-oxycarbonyl)-4-oxatricyclo[4.2.1.0^(3,7)]nonan-5-on-2-yl        methacrylate)        -   Mw=7,700        -   Mw/Mn=1.82

Surfactant A:

-   -   3-methyl-3-(2,2,2-trifluoroethoxymethyl)oxetane/tetrahydrofuran/2,2-dimethyl-1,3-propanediol        copolymer (Omnova Solutions, Inc.)

-   -   -   a:(b+b′):(c+c′)−1:4−7:0.01−1 (molar ratio)        -   Mw=1,500

TABLE 4 Acid diffusion Resin PAG control agent Surfactant Solvent 1Solvent 2 Resist (pbw) (pbw) (pbw) (pbw) (pbw) (pbw) Example 1-1 R-1 P-1PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5) (3.0) (1,728) (192) 1-2 R-2P-2 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5 (3.0) (1,728) (192) 1-3 R-3P-3 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5) (3.0) (1,728) (192) 1-4R-4 P-4 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5) (3.0) (1,728) (192)1-5 R-5 P-5 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5) (3.0) (1,728)(192) 1-6 R-6 P-6 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5) (3.0)(1,728) (192) 1-7 R-7 P-7 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6) (2.5)(3.0) (1,728) (192) 1-8 R-8 P-8 PAG-X Q-1 SF-1 PGMEA GBL (80) (7.6)(2.5) (3.0) (1,728) (192) 1-9 R-9 P-9 PAG-X Q-1 SF-1 PGMEA GBL (80)(7.6) (2.5) (3.0) (1,728) (192) 1-10 R-10 P-10 PAG-X Q-1 SF-1 PGMEA GBL(80) (7.6) (2.5) (3.0) (1,728) (192) 1-11 R-11 P-11 PAG-X Q-1 SF-1 PGMEAGBL (80) (7.6) (2.5) (3.0) (1,728) (192) 1-12 R-12 P-12 PAG-X Q-1 SF-1PGMEA GBL (80) (7.6) (2.5) (3.0) (1,728) (192) 1-13 R-13 P-1 PAG-X Q-1SF-1 PGMEA GBL (80) (13.3) (2.5) (3.0) (1,728) (192) 1-14 R-14 P-2 PAG-YQ-1 SF-1 PGMEA GBL 80 (13.3) (2.5) (3.0) (1,728) (192) Comparative 1-1R-15 P-1 PAG-X Q-2 SF-1 PGMEA GBL Example (80) (7.6) (1.7) (3.0) (1,728)(192) 1-2 R-16 P-1 PAG-X Q-3 SF-1 PGMEA GBL (80) (7.6) (3.8) (3.0)(1,728) (192) 1-3 R-17 P-1 PAG-X Q-4 SF-1 PGMEA GBL (80) (7.6) (3.4)(3.0) (1.728) (192) 1-4 R-18 P-1 PAG-X Q-5 SF-1 PGMEA GBL (80) (7.6)(3.0) (3.0) (1,728) (192) 1-5 R-19 P-1 PAG-X Q-6 SF-1 PGMEA GBL (80)(7.6) (4.1) (3.0) (1,728) (192) 1-6 R-20 P-1 PAG-X Q-7 SF-1 PGMEA GBL(80) (7.6) (5.1) (3.0) (1,728) (192) 1-7 R-21 P-1 PAG-Y Q-2 SF-1 PGMEAGBL (80) (13.3) (1.7) (3.0) (1,728) (192)

Examples 2-1 to 2-14 and Comparative Examples 2-1 to 2-7

Resist Test 1 (ArF Lithography)

On a silicon substrate, an antireflective coating solution (ARC-29A,Nissan Chemical Industries, Ltd.) was coated and baked at 200° C. for 60seconds to form an ARC of 100 nm thick. Each of the resist solutionsshown in Table 4 was spin coated on the silicon substrate and baked on ahot plate at 100° C. for 60 seconds, forming a resist film of 90 nmthick on the ARC. The wafer was exposed on an ArF excimer laserimmersion lithography scanner (NSR-S610C by Nikon Corp., NA 1.30, dipoleillumination, Cr mask), baked (PEB) at 80° C. for 60 seconds, anddeveloped in a 2.38 wt % tetramethylammonium hydroxide (TMAH) aqueoussolution for 60 seconds, forming a pattern.

Resist evaluation was made on a 40-nm 1:1 line-and-space pattern. Onobservation under an electron microscope, the optimum exposure dose(Eop) was defined as an exposure dose (mJ/cm²) which provided a linewidth of 40 nm.

The width of lines of a 40-nm 1:1 line-and-space pattern was measuredunder SEM to determine a line width variation (30 points measured, 3σvalue computed), which was reported as line width roughness (LWR). Asmaller value of LWR indicates a line pattern with a less fluctuationand of better profile. In this test, the sample is rated good when LWRis equal to or less than 3.0 nm and poor when LWR is equal to or morethan 3.1 nm.

An L/S pattern was formed by exposure in the optimum dose (determined inthe sensitivity evaluation) through the mask with the pitch fixed andthe line width varied. MEF was calculated from variations of the maskline width and the pattern space width according to the followingequation:MEF=(pattern space width)/(mask line width)−bwherein b is a constant. A value closer to unity (1) indicates betterperformance.

Further, for a trench pattern printed at the optimum exposure dose, thedependency of trench size on focus was examined. A range (nm) of focuscapable of resolution was determined and reported as DOF.

The collapse limit was a minimum width (nm) of lines which could beresolved without collapse when the line width was reduced by increasingthe exposure dose. A smaller value indicates better collapse resistance.

The results of evaluation are shown in Table 5.

TABLE 5 Col- lapse Re- Eop LWR DOF limit sist (mJ/cm²) (nm) MEF (nm)(nm) Example 2-1 R-1 31 2.6 2.4 75 30 2-2 R-2 32 2.8 2.5 75 28 2-3 R-334 2.8 2.5 75 27 2-4 R-4 33 2.5 2.4 70 29 2-5 R-5 32 2.6 2.3 70 30 2-6R-6 36 2.7 2.3 75 27 2-7 R-7 30 2.9 2.3 70 26 2-8 R-8 31 2.7 2.3 70 272-9 R-9 33 2.8 2.1 75 27 2-10 R-10 31 2.8 2.2 70 28 2-11 R-11 33 2.7 2.270 29 2-12 R-12 34 2.8 2.7 70 29 2-13 R-13 31 2.5 2.4 65 30 2-14 R-14 322.6 2.4 70 27 Comparative 2-1 R-15 38 3.5 4.0 40 39 Example 2-2 R-16 313.1 4.3 35 35 2-3 R-17 35 3.3 4.1 45 35 2-4 R-18 34 3.4 3.9 45 38 2-5R-19 33 3.2 4.3 35 35 2-6 R-20 32 3.3 4.2 35 36 2-7 R-21 40 3.3 3.9 4038

As seen from the results of Table 5, the resist compositions within thescope of the invention offer advantages including improved LWR, MEF,DOF, and collapse limit, and are suited as resist material for ArFimmersion lithography.

Examples 3-1 to 3-14 and Comparative Examples 3-1 to 3-7

Resist Test 2 (ArF Lithography)

On a substrate, a spin-on carbon film ODL-50 (Shin-Etsu Chemical Co.,Ltd.) having a carbon content of 80 wt % was deposited to a thickness of200 nm and a silicon-containing spin-on hard mask SHB-A940 having asilicon content of 43 wt % was deposited thereon to a thickness of 35nm. On this substrate for trilayer process, the resist composition inTable 4 was spin coated, then baked on a hot plate at 100° C. for 60seconds to form a resist film of 100 nm thick. Using an ArF excimerlaser immersion lithography scanner NSR-610C (Nikon Corp., NA 1.30, a0.98/0.78, 4/5 annular illumination), pattern exposure was performedthrough Mask A or B described below.

Mask A is a 6% halftone phase shift mask bearing a line pattern with apitch of 100 nm and a line width of 50 nm (on-wafer size). Afterexposure through Mask A, the wafer was baked (PEB) for 60 seconds anddeveloped. Specifically, butyl acetate was injected from a developmentnozzle while the wafer was spun at 30 rpm for 3 seconds, which wasfollowed by stationary puddle development for 27 seconds. As a result,the unexposed regions which had been masked with Mask A were dissolvedin the developer, that is, image reversal took place to form aline-and-space (L/S) pattern with a space width of 50 nm and a pitch of100 nm.

Mask B is a 6% halftone phase shift mask bearing a line pattern with apitch of 200 nm and a line width of 45 nm (on-wafer size). Afterexposure through Mask B, the wafer was baked (PEB) for 60 seconds anddeveloped. Specifically, butyl acetate was injected from a developmentnozzle while the wafer was spun at 30 rpm for 3 seconds, which wasfollowed by stationary puddle development for 27 seconds. As a result,the unexposed regions which had been masked with Mask B were dissolvedin the developer, that is, image reversal took place to form an isolatedspace pattern (referred to as “trench pattern”, hereinafter) with aspace width of 45 nm and a pitch of 200 nm.

Evaluation of Sensitivity

As an index of sensitivity, the optimum dose (Eop, mJ/cm²) whichprovided an L/S pattern with a space width of 50 nm and a pitch of 100nm on exposure through Mask A was determined.

Evaluation of Line Width Roughness (LWR)

An L/S pattern was formed by exposure in the optimum dose (determined inthe sensitivity evaluation) through Mask A (in Resist Test 2). Byobservation under TDSEM S-9380 (Hitachi Hitechnologies, Ltd.), the spacewidth was measured at longitudinally spaced apart 10 points, from whicha 3-fold value (3σ) of standard deviation (σ) was determined andreported as LWR. A smaller value of 3σ indicates a pattern having alower roughness and more uniform space width.

Evaluation of Mask Error Factor (MEF)

An L/S pattern was formed by exposure in the optimum dose (determined inthe sensitivity evaluation) through Mask A with the pitch fixed and theline width varied. MEF was calculated from variations of the mask linewidth and the pattern space width according to the following equation:MEF=(pattern space width)/(mask line width)−bwherein b is a constant. A value closer to unity (1) indicates betterperformance.Evaluation of Depth-of-Focus (DOF) Margin

The exposure dose and DOF which ensured to form a trench pattern with aspace width of 35 nm on exposure through Mask B were defined as theoptimum exposure dose and the optimum DOF, respectively. The depth (nm)over which focus was changed that could form a resist pattern with aspace width of 35 nm±10% (i.e., 31.5 nm to 38.5 nm) was determined andreported as DOF. A larger value indicates a smaller change of patternsize with a change of DOF and hence, better DOF margin.

The results are shown in Table 6.

TABLE 6 Re- Eop LWR DOF sist (mJ/cm²) (nm) MEF (nm) Example 3-1 R-1 313.0 3.1 120 3-2 R-2 33 3.2 3.0 130 3-3 R-3 35 3.3 3.0 130 3-4 R-4 33 3.03.0 120 3-5 R-5 32 3.3 3.2 120 3-6 R-6 32 3.1 3.0 130 3-7 R-7 33 3.2 2.8130 3-8 R-8 31 3.3 2.7 130 3-9 R-9 31 3.1 2.9 120 3-10 R-10 32 3.2 3.0130 3-11 R-11 34 3.2 3.0 120 3-12 R-12 32 3.3 3.1 110 3-13 R-13 32 3.02.9 130 3-14 R-14 32 3.3 2.7 120 Comparative 3-1 R-15 38 4.7 4.6 70Example 3-2 R-16 33 4.3 4.7 70 3-3 R-17 36 4.4 4.4 75 3-4 R-18 37 4.64.6 80 3-5 R-19 35 4.3 4.7 75 3-6 R-20 34 4.2 4.7 75 3-7 R-21 41 4.3 4.770

As seen from the results of Table 6, the resist compositions within thescope of the invention form negative patterns via organic solventdevelopment with the advantages of improved LWR, MEF and DOF. Thecompositions are advantageously applicable to form patterns of finefeature size by lithography.

While the invention has been illustrated and described in typicalembodiments, it is not intended to be limited to the details shown,since various modifications and substitutions can be made withoutdeparting in any way from the spirit of the present invention. As such,further modifications and equivalents of the invention herein disclosedmay occur to persons skilled in the art using no more than routineexperimentation, and all such modifications and equivalents are believedto be within the spirit and scope of the invention as defined by thefollowing claims.

Japanese Patent Application No. 2014-226553 is incorporated herein byreference.

Although some preferred embodiments have been described, manymodifications and variations may be made thereto in light of the aboveteachings. It is therefore to be understood that the invention may bepracticed otherwise than as specifically described without departingfrom the scope of the appended claims.

The invention claimed is:
 1. An onium salt compound having the generalformula (1):

wherein R¹¹, R²², R³³ and R⁰¹ are each independently hydrogen, or astraight C₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalent hydrocarbongroup which may be substituted with or separated by a heteroatom, a pairof R¹¹ and R²², or R³³ and R⁰¹ may bond together to form a ring with thecarbon atoms to which they are attached, R⁴⁴ and R⁵⁵ are eachindependently a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ monovalenthydrocarbon group which may be substituted with or separated by aheteroatom, a pair of R⁴⁴ and R⁵⁵ may bond together to form a ring withthe nitrogen atom to which they are attached, the ring may have anoxygen atom, sulfur atom or NH moiety interposed therein, j is 0 or 1, kis a number in the range: 0≦k≦1 when j=0 and 0≦k≦3 when j=1, Z⁺ is asulfonium cation of the general formula (a) or iodonium cation of thegeneral formula (b):

wherein R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are each independently a straight C₁-C₂₀ orbranched or cyclic C₃-C₂₀ monovalent hydrocarbon group which may besubstituted with or separated by a heteroatom, or any two or more ofR¹⁰⁰, R²⁰⁰ and R³⁰⁰ may bond together to form a ring with the sulfuratom, the ring may have a carbonyl moiety, sulfur atom, S(═O) moiety,SO₂ moiety, oxygen atom, or NH moiety interposed therein, R⁴⁰⁰ and R⁵⁰⁰are each independently a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom.
 2. A resist composition comprising (A) the onium saltcompound of claim 1, (B) a polymer, (C) a photoacid generator, and (D)an organic solvent, said polymer comprising recurring units having thegeneral formulae (2) and (3):

wherein R^(1a) is hydrogen, fluorine, methyl or trifluoromethyl, Z^(a)is a single bond, phenylene, naphthylene or (backbone)-C(═O)—O—Z′—, Z′is a straight C₁-C₁₀ or branched or cyclic C₃-C₁₀ alkylene group whichmay contain a hydroxyl moiety, ether bond, ester bond or lactone ring,or phenylene or naphthylene group, XA is an acid labile group, and YL ishydrogen or a polar group having at least one structure selected fromthe group consisting of hydroxyl, cyano, carbonyl, carboxyl, ether bond,ester bond, sulfonate bond, carbonate bond, lactone ring, sultone ring,and carboxylic anhydride.
 3. The resist composition of claim 2 whereinthe polymer further comprises recurring units (d1) or (d2) having thegeneral formula:

wherein R^(1a), R¹⁰⁰, R²⁰⁰ and R³⁰⁰ are is as defined above, L′ is aC₂-C₅ alkylene group, R^(Y) is a straight C₁-C₂₀ or branched or cyclicC₃-C₂₀ monovalent hydrocarbon group which may be substituted with orseparated by a heteroatom, A is hydrogen or trifluoromethyl, L″ is asingle bond or a straight C₁-C₂₀ or branched or cyclic C₃-C₂₀ divalenthydrocarbon group which may be substituted with or separated by aheteroatom, m is 0 or 1, n is 0 or 1, with the proviso that n is 0 whenL″ is a single bond.
 4. The resist composition of claim 2 wherein thephotoacid generator has the general formula (4):

wherein R¹⁰⁰, R²⁰⁰, and R³⁰⁰ are as defined above, X⁻ is an anion of anyone of the general formulae (5) to (8):

wherein R^(fa), R^(fb1), R^(fb2), R^(fc1), R^(fc2), and R^(fc3) are eachindependently fluorine or a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀monovalent hydrocarbon group which may be substituted with or separatedby a heteroatom, R^(fb1) and R^(fb2), or R^(fc1) and R^(fc2) may bondtogether to form a ring with the segments to which they are attached,R^(fd) is a straight C₁-C₄₀ or branched or cyclic C₃-C₄₀ monovalenthydrocarbon group which may be substituted with or separated by aheteroatom.
 5. The resist composition of claim 2, further comprising anonionic nitrogen-containing compound.
 6. The resist composition ofclaim 2, further comprising a surfactant which is insoluble orsubstantially insoluble in water and soluble in alkaline developerand/or a surfactant which is insoluble or substantially insoluble inwater and alkaline developer.
 7. A pattern forming process comprisingthe steps of applying the resist composition of claim 2 onto asubstrate, prebaking to form a resist film, exposing the resist film toKrF excimer laser, ArF excimer laser, EB or EUV through a photomask,baking, and developing the exposed resist film in a developer.
 8. Thepattern forming process of claim 7 wherein the exposing step is byimmersion lithography wherein a liquid having a refractive index of atleast 1.0 is interposed between the resist film and a projection lens.9. The pattern forming process of claim 8, further comprising the stepof forming a protective film on the resist film, and in the immersionlithography, the liquid is interposed between the protective film andthe projection lens.
 10. The onium salt compound of claim 1 wherein R⁴⁴and R⁵⁵ bond together to form a ring with the nitrogen atom to whichthey are attached, and the ring may have an oxygen atom, sulfur atom orNH moiety interposed therein.
 11. The onium salt compound of claim 10wherein the ring is selected from the group consisting of the followingstructures: